Course: Semiconductor Contacts: Their Science,  Fabrication, and Characterization

Course Objectives

• Understand the formation of potential barriers at metal/semiconductor interfaces.
   
• Learn about charge transfer processes that determine whether a contact is ohmic or rectifying.
   
• Learn about characterization of ohmic and rectifying contacts and experimental limitations.
   
• Know about the reliability of practical ohmic contacts and interconnects.

Course Description
Reliable contacts are needed to operate all electronic devices successfully. Metal/semiconductor contacts are often the limiting factor in device operation; however, they are often neglected in device technology.

This two day course reviews the basic concepts of potential barrier formation at metal/semiconductor interfaces and discusses charge transfer processes that determine whether a contact is ohmic. Methods for preparing contacts (i.e., sputtering, chemical vapor deposition, etc.) are also discussed, with particular emphasis on the effect of preparation techniques on fundamental properties. Contacts to a variety of materials, including Si, III-V, and II-VI semiconductors, are considered.

Characterization techniques are discussed in detail. These include barrier height measurements (i.e., current/voltage, capacitance/voltage, and photo response techniques) and specific contact resistance measurements (i.e., transmission line and Kelvin bridge methods).

The approach is to supplement a historical discussion of fundamentals with current research and development in the field of contact technology. This also includes information about the reliability of contacts and interconnects, which is of great significance to the electronics industry.

Who Should Attend?
Scientists, technicians, and others working with semiconductor materials and devices who want to understand contacts and their fabrication and characterization.

Instructor:  
Timothy Coutts, Leader of Device Development Group, National Renewable Energy Laboratory

Course Materials:
Course Notes

Cost: $850.00