Welcome to the Imec Center for Advanced Metrology Solutions (CAMS). Imec CAMS draws on the extensive experience of imec to offer high quality services and products, and aims to be a reliable and trustworthy partner for in-depth characterization of a wide variety of (semiconductor) structures.

You can discover our services and products below:

SERVICES

Scanning spreading resistance microscopy
SSRM provides high-resolution quantitative carrier distributions in 1D, 2D & 3D semiconductor structures. As inventor of this electrical AFM-based technique, imec makes this technique now available as a service.
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Sample preparation
Imec CAMS can help you with a wide variety of sample preparation methods, ranging from simple wafer dicing to advanced ion beam preparation.
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Materials and components analysis
Besides SSRM, the materials and components analysis group houses a wide variety of material characterization techniques. Upon specific request and depending availability, these are also made available to external customers.
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Partnership and training
Imec CAMS offers extensive tailor made training to introduce SSRM into your lab and can be your partner for applying AFM-based metrology to new devices and materials, and implementing novel characterization concepts. As material characterization experts we can also be your partner for developing or implementing new material analysis techniques and modes.
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PRODUCTS

Full diamond probes
The Imec CAMS diamond AFM tips are made from solid boron-doped polycrystalline diamond. These tips are the enabler for high-resolution electrical AFM measurements requiring high forces, such as Scanning Spreading Resistance Microscopy (SSRM).
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Calibration standards and test samples
The Imec CAMS calibration standards are suited for the calibration of quantitative electrical measurements. We also offer a range of test samples allowing to evaluate the performance of your tools.
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